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- [23] Temperature measurement by optical beam deflection method 9TH INTERNATIONAL CONFERENCE ON PHOTOACOUSTIC AND PHOTOTHERMAL PHENOMENA, CONFERENCE DIGEST, 1996, : 383 - 384
- [29] Direct evidence of "spring softening" nonlinearity in micromachined mechanical resonator using optical beam deflection technique JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (03): : 732 - 736