Control of emission characteristics of Si field emitter arrays by impurity doping

被引：0
|
作者：
机构：
来源：
Denshi Gijutsu Sogo Kenkyusho Iho | / 4卷 / 1-7期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Improvement of electron emission characteristics of Si field emitter arrays by surface modification
    Ehara, K
    Kanemaru, S
    Matsukawa, T
    Itoh, J
    APPLIED SURFACE SCIENCE, 1999, 146 (1-4) : 172 - 176
  • [2] Control of emission characteristics of silicon field emitter arrays by an ion implantation technique
    Kanemaru, S
    Hirano, T
    Tanoue, H
    Itoh, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03): : 1885 - 1888
  • [3] ACTIVE CONTROL OF THE EMISSION CURRENT OF FIELD EMITTER ARRAYS
    YOKOO, K
    ARAI, M
    MORI, M
    BAE, JS
    ONO, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02): : 491 - 493
  • [4] Emission characteristics of JFET-based field emitter arrays
    Yokoo, Y
    Arai, M
    Kawakami, M
    Kayama, H
    Kitano, N
    Mimura, H
    55TH ANNUAL DEVICE RESEARCH CONFERENCE, DIGEST - 1997, 1997, : 152 - 153
  • [5] Emission uniformity improvement of Si field emitter arrays by surface modification
    Nagao, M
    Nicolaescu, D
    Matsukawa, T
    Kanemaru, S
    Itoh, J
    Koga, K
    Kawase, T
    Honda, K
    Norikane, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (04): : 1581 - 1585
  • [6] Electron emission and luminescent characteristics of vacuum-sealed poly-Si field emitter arrays
    Uh, HS
    Jo, SH
    Nam, JH
    Cho, YS
    Nam, HS
    Kwon, SJ
    Yoo, JS
    Lee, JD
    IVMC'97 - 1997 10TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, 1997, : 251 - 255
  • [7] Quantitative Field Emission Imaging for Studying the Doping-Dependent Emission Behavior of Silicon Field Emitter Arrays
    Schels, Andreas
    Herdl, Florian
    Hausladen, Matthias
    Wohlfartsstaetter, Dominik
    Edler, Simon
    Bachmann, Michael
    Pahlke, Andreas
    Schreiner, Rupert
    Hansch, Walter
    MICROMACHINES, 2023, 14 (11)
  • [8] Emission characteristics of TiN-coated silicon field emitter arrays
    Kang, SY
    Lee, JH
    Song, YH
    Kim, YT
    Cho, KI
    Yoo, HJ
    IVMC'97 - 1997 10TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, 1997, : 376 - 380
  • [9] Residual gas effects on the emission characteristics of silicon field emitter arrays
    Gilkes, MJ
    Nicolaescu, D
    Wilshaw, PR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (02): : 948 - 951
  • [10] Emission characteristics of TiN-coated silicon field emitter arrays
    Kang, SY
    Lee, JH
    Song, YH
    Kim, YT
    Cho, KI
    Yoo, HJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (02): : 871 - 874
12345