共 50 条
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- [3] ETCH PRODUCTS FROM THE REACTION OF XEF2 WITH SIO2, SI3N4, SIC, AND SI IN THE PRESENCE OF ION-BOMBARDMENT JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 927 - 931
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- [8] Synthesis and Consolidation of Composite Materials in the SiC–Si3N4–Si2N2O System Powder Metallurgy and Metal Ceramics, 2023, 62 : 459 - 468
- [9] LOW-TEMPERATURE DEPOSITION OF SiO2, Si3N4 OR SiO2-Si3N4. IBM technical disclosure bulletin, 1986, 28 (09):