Deposition of magnetic thin films by IBAD

被引：0

作者：

Sikola, T. ^{[1
]}

Spousta, J. ^{[1
]}

Dittrichova, L. ^{[1
]}

Stransky, M. ^{[1
]}

Zlamal, J. ^{[1
]}

Matejka, F. ^{[1
]}

Nebojsa, A. ^{[1
]}

Zemek, J. ^{[1
]}

Perina, V. ^{[1
]}

Rafaja, D. ^{[1
]}

Ranno, L. ^{[1
]}

机构：

[1] Technical Univ of Brno, Brno, Czech Republic

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 148卷 / 1-4期

关键词：

Cobalt - Composition effects - Ion beams - Magnetic anisotropy - Nickel - Sputter deposition - Surface roughness - Thermal effects;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Cobalt and nickel magnetic films were prepared by ion-beam assisted deposition method (IBAD). The main goal of the work was to study the influence of the assisting low-energy-argon-ion beam and substrate temperature on the characteristics and properties of the films, in particular on thickness, roughness, chemical composition, structure and magnetic properties of thin films. The experiments revealed that the assisting argon ions influence most remarkably an in-plane magnetic anisotropy of the films. On the other hand, enhanced substrate temperatures suppress the anisotropy of the films. Influence of these two deposition parameters on roughness, composition and structure of thin films was not dramatic.

引用

页码：907 / 911

共 50 条

[41] Magnetic properties of NdFeB thin films grown by a pulsed laser deposition
Yang, CJ
Kim, SW
METALS AND MATERIALS-KOREA, 1998, 4 (05): : 1063 - 1069
[42] Effect of deposition process on the magnetic properties of coupled permalloy thin films
1600, (73):
[43] Effect of deposition process on the magnetic properties of coupled permalloy thin films
Hill, E.W.
Li, J.P.
Birtwistle, B.K.
Journal of Applied Physics, 1993, 73 (10 pt 2B):
[44] Structural and magnetic study of FePt thin films as a function of the deposition temperature
Martins, A
Fantini, MCA
Santos, AD
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2001, 187 (01): : 189 - 193
[45] Electrochemical deposition of novel nanostructured magnetic thin films for advanced applications
Sulitanu, ND
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2002, 95 (03): : 230 - 235
[46] ON PROBLEM OF DEPENDENCE OF UNIAXIAL MAGNETIC ANISOTROPY OF THIN FILMS ON ANGLE OF DEPOSITION
KAMBERSKY, M
KAMBERSKY, V
CZECHOSLOVAK JOURNAL OF PHYSICS, 1961, 11 (06) : 454 - &
[47] Effect of deposition conditions on the magnetic properties of evaporated Fe thin films
Mebarki, Mourad
Layadi, Abdelhamid
Ghebouli, Brahim
Fouad, Osama Ahmed
Ibrahim, Ibrahim Ahmed
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2017, 78 (01):
[48] Magnetic property and recording performance of chemical deposition CoP thin films
Wang Haicheng
Zhou Qunfei
Teng Jiao
Wang Lijin
Yu Guanghua
RARE METALS, 2012, 31 (03) : 260 - 263
[49] Hard magnetic SmCo thin films prepared by pulsed laser deposition
Neu, V
Thomas, J
Fähler, S
Holzapfel, B
Schultz, L
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2002, 242 : 1290 - 1293
[50] Magnetic properties of NdFeB thin films grown by a pulsed laser deposition
Yang, Choong Jin
Kim, Sang Won
Metals and Materials International, 1998, 4 (05): : 1063 - 1069

← 1 2 3 4 5 →