Deposition of magnetic thin films by IBAD

被引：0
|
作者：
Sikola, T. [1 ]
Spousta, J. [1 ]
Dittrichova, L. [1 ]
Stransky, M. [1 ]
Zlamal, J. [1 ]
Matejka, F. [1 ]
Nebojsa, A. [1 ]
Zemek, J. [1 ]
Perina, V. [1 ]
Rafaja, D. [1 ]
Ranno, L. [1 ]
机构：
[1] Technical Univ of Brno, Brno, Czech Republic
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 148卷 / 1-4期
关键词：
Cobalt - Composition effects - Ion beams - Magnetic anisotropy - Nickel - Sputter deposition - Surface roughness - Thermal effects;
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摘要：
Cobalt and nickel magnetic films were prepared by ion-beam assisted deposition method (IBAD). The main goal of the work was to study the influence of the assisting low-energy-argon-ion beam and substrate temperature on the characteristics and properties of the films, in particular on thickness, roughness, chemical composition, structure and magnetic properties of thin films. The experiments revealed that the assisting argon ions influence most remarkably an in-plane magnetic anisotropy of the films. On the other hand, enhanced substrate temperatures suppress the anisotropy of the films. Influence of these two deposition parameters on roughness, composition and structure of thin films was not dramatic.
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页码：907 / 911
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