CO2 laser annealing on fluorinated silicon oxide films

被引：0
|
作者：
Wang, Na-Fu [1 ]
Houng, Mau-Phon [1 ]
Wang, Yeong-Her [1 ]
机构：
[1] Department of Electrical Engineering, National Cheng-Kung University, University Road, Tainan, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 9 A期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：5227 / 5231
相关论文
共 50 条
  • [1] CO2 laser annealing on fluorinated silicon oxide films
    Wang, NF
    Houng, MP
    Wang, YH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9A): : 5227 - 5231
  • [2] Patterned laser annealing of silicon oxide films
    Richter, J.
    Meinertz, J.
    Ihlemann, J.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2011, 104 (03): : 759 - 764
  • [3] Patterned laser annealing of silicon oxide films
    J. Richter
    J. Meinertz
    J. Ihlemann
    Applied Physics A, 2011, 104 : 759 - 764
  • [4] Non-melting annealing of silicon by CO2 laser
    Florakis, A.
    Verrelli, E.
    Giubertoni, D.
    Tzortzis, G.
    Tsoukalas, D.
    THIN SOLID FILMS, 2010, 518 (09) : 2551 - 2554
  • [5] Controlling defect and Si nanoparticle luminescence from silicon oxynitride films with CO2 laser annealing
    Tewary, A
    Kekatpure, RD
    Brongersma, ML
    APPLIED PHYSICS LETTERS, 2006, 88 (09)
  • [6] CO2 laser annealing NiTi thin films deposited by sputtering
    He, Q
    Huang, WM
    Hong, MH
    Chong, TC
    Fu, YQ
    Du, HJ
    FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 5063 : 319 - 322
  • [7] CO2 Laser Annealing for USJ Formation in Silicon: Comparison of Simulation and Experiment
    Stathopoulos, Spyridon
    Florakis, Antonios
    Tzortzis, Giorgos
    Laspas, Theodor
    Triantafyllopoulos, Andreas
    Spiegel, Yohann
    Torregrosa, Frank
    Tsoukalas, Dimitris
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2014, 61 (03) : 696 - 701
  • [8] CO2-LASER ANNEALING OF SILICON
    NAUKKARINEN, K
    TUOMI, T
    BLOMBERG, M
    LUOMAJARVI, M
    RAUHALA, E
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (08) : 5634 - 5640
  • [9] TEA CO2 pulsed laser deposition of silicon suboxide films
    Drínek, V
    Pola, J
    Bastl, Z
    Subrt, J
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2001, 288 (1-3) : 30 - 36
  • [10] Analysis of silicon nanocrystals in silicon-rich SiO2 synthesized by CO2 laser annealing
    Lin, CJ
    Lin, GR
    Chueh, YL
    Chou, LJ
    OPTOELECTRONIC MATERIALS AND DEVICES FOR OPTICAL COMMUNICATIONS, 2005, 6020
12345