X-ray diffraction and scanning electron microscopy observation of lead zirconate titanate thick film formed by gas deposition method

被引：0
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作者：
Ichiki, Masaaki [1 ]
Akedo, Jun [1 ]
Schroth, Andreas [1 ]
Maeda, Ryutaro [1 ]
Ishikawa, Yuichi [1 ]
机构：
[1] Ministry of Int Trade and Industry, Ibaraki, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 9 B期
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页码：5815 / 5819
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