X-ray diffraction and scanning electron microscopy observation of lead zirconate titanate thick film formed by gas deposition method

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Ichiki, Masaaki [1 ]
Akedo, Jun [1 ]
Schroth, Andreas [1 ]
Maeda, Ryutaro [1 ]
Ishikawa, Yuichi [1 ]
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[1] Ministry of Int Trade and Industry, Ibaraki, Japan
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页码:5815 / 5819
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