Photoluminescence study of ion-implanted silicon

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作者：
Terashima, Koichi [1 ]
Ikarashi, Taeko [1 ]
Watanabe, Masahito [1 ]
Kitano, Tomohisa [1 ]
机构：
[1] Silicon Systems Research Lab
来源：
NEC Research and Development | 1998年 / 39卷 / 03期
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页码：289 / 298
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