RECENT PROGRESS IN THE NONDESTRUCTIVE ANALYSIS OF SURFACES, THIN FILMS, AND INTERFACES BY SPECTROELLIPSOMETRY.

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作者：
Aspnes, D.E. [1 ]
机构：
[1] Bell Communications Research Inc,, Murray Hill, NJ, USA, Bell Communications Research Inc, Murray Hill, NJ, USA
来源：
Applications of surface science | 1984年 / 22-23卷
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摘要：
36
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页码：792 / 803
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