RECENT PROGRESS IN THE NONDESTRUCTIVE ANALYSIS OF SURFACES, THIN FILMS, AND INTERFACES BY SPECTROELLIPSOMETRY.

被引：0
|
作者：
Aspnes, D.E. [1 ]
机构：
[1] Bell Communications Research Inc,, Murray Hill, NJ, USA, Bell Communications Research Inc, Murray Hill, NJ, USA
来源：
Applications of surface science | 1984年 / 22-23卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
36
引用
收藏
页码：792 / 803
相关论文
共 50 条
  • [1] RECENT PROGRESS IN THE NONDESTRUCTIVE ANALYSIS OF SURFACES, THIN-FILMS, AND INTERFACES BY SPECTROELLIPSOMETRY
    ASPNES, DE
    APPLICATIONS OF SURFACE SCIENCE, 1985, 22-3 (MAY): : 792 - 803
  • [2] Process monitoring of semiconductor thin films and interfaces by spectroellipsometry
    Brenot, R
    Drévillon, B
    Bulkin, P
    Roca i Cabarrocas, P
    Vanderhaghen, R
    APPLIED SURFACE SCIENCE, 2000, 154 : 283 - 290
  • [3] Process monitoring of semiconductor thin films and interfaces by spectroellipsometry
    Brenot, R.
    Drévillon, B.
    Bulkin, P.
    Roca I Cabarrocas, P.
    Vanderhaghen, R.
    Applied Surface Science, 2000, 154 : 283 - 290
  • [4] Process monitoring of semiconductor thin films and interfaces by spectroellipsometry
    Brenot, R.
    Drevillon, B.
    Bulkin, P.
    Roca i Cabarrocas, P.
    Vanderhaghen, R.
    Applied Surface Science, 2000, 154 : 283 - 290
  • [5] Process monitoring of semiconductor thin films and interfaces by spectroellipsometry
    Brenot, R
    Drévillon, B
    PHOTODETECTORS: MATERIALS AND DEVICES IV, 1999, 3629 : 382 - 392
  • [6] THE ANALYSIS OF THIN-FILMS, INTERFACES AND SURFACES - PREFACE
    GARTEN, RPH
    WERNER, HW
    ANALYTICA CHIMICA ACTA, 1994, 297 (1-2) : 1 - 1
  • [7] Recent progress in first principles investigations of magnetism of surfaces and thin films
    Wu, RQ
    Freeman, AJ
    MAGNETISM IN METALS, 1997, 45 : 133 - 147
  • [8] Recent Progress on Perovskite Surfaces and Interfaces in Optoelectronic Devices
    Luo, Deying
    Li, Xiaoyue
    Dumont, Antoine
    Yu, Hongyu
    Lu, Zheng-Hong
    ADVANCED MATERIALS, 2021, 33 (30)
  • [9] TRENDS IN APPLICATIONS AND STRATEGIES IN THE ANALYSIS OF THIN-FILMS, INTERFACES AND SURFACES
    GARTEN, RPH
    WERNER, HW
    ANALYTICA CHIMICA ACTA, 1994, 297 (1-2) : 3 - 14
  • [10] Magnetism of chromium at surfaces, at interfaces and in thin films
    Zabel, H
    JOURNAL OF PHYSICS-CONDENSED MATTER, 1999, 11 (48) : 9303 - 9346
12345