Art and science of lithography simulation

被引：0
|
作者：
Eib, Nicholas K. [1 ]
机构：
[1] LSI Logic Corp, Santa Clara, United States
来源：
Microlithography World | / 5卷 / 01期
关键词：
Computer aided logic design - Computer simulation - Computer software - Data processing - Integrated circuit manufacture - Lighting - Masks - Photoresists - Projection systems - Substrates - WSI circuits;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Four different lithography simulation packages have been used at LSI Logic to develop and refine processes. Accurate prediction requires reliable processing data as well as a simulation package matched to the problem.
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页码：11 / 15
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