Determination of the chemical and physical properties of hydrogenated carbon deposits produced by d.c. magnetron reactive sputtering

被引：0
|
作者：
Brande, Pierre Vanden [1 ]
Lucas, Stephane [1 ]
Winand, Rene [1 ]
Weymeersch, Alain [1 ]
Renard, Lucien [1 ]
机构：
[1] Universite Libre de Bruxelles, Brussels, Belgium
来源：
Surface and Coatings Technology | 1994年 / 68-69卷
关键词：
Carbon autofeeding target system - Direct current magnetron reactive sputtering - Elastic recoil detection analysis - Gas flow ratio - Hydrogen content - Hydrogenated carbon deposits - Mass flow controller - Nanoindentation - Vacuum chamber - Young modulus;
D O I：
10.1016/0257-8972(94)90233-X
中图分类号：
学科分类号：
摘要：
引用
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页码：656 / 661
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