Fabrication of InP/air-gap distributed Bragg reflectors and micro-cavities

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作者：
Streubel, K. [1 ]
Rapp, S. [1 ]
Andre, J. [1 ]
Chitica, N. [1 ]
机构：
[1] Royal Inst of Technology, Kista, Sweden
来源：
Materials science & engineering. B, Solid-state materials for advanced technology | 1997年 / B44卷 / 1-3期
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页码：364 / 367
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