Checking trapezoidal-profile holographic diffraction gratings

被引：0
|
作者：
Dikaev, Yu.M. [1 ]
Yassen, M.L. [1 ]
机构：
[1] Radio Engineering and Electronics, Inst, Acad of Sciences of the USSR, Russia
来源：
Soviet microelectronics | 1991年 / 20卷 / 01期
关键词：
Optical Gratings;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：57 / 60
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