Interferometric methods for surface metrology

被引：0
|
作者：
Pfeifer, Tilo
Tutsch, Rainer
Broermann, Ernst
机构：
来源：
SME Technical Paper (Series) MS | 1989年
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：89 / 480
相关论文
共 50 条
  • [41] Seismic surface waves in a suburban environment: Active and passive interferometric methods
    University of Edinburgh, Edinburgh, United Kingdom
    不详
    Leading Edge, 2008, 2 (210-218):
  • [42] SPECKLE METHODS IN METROLOGY
    TRIBILLON, G
    OPTICA ACTA, 1977, 24 (08): : 877 - 891
  • [43] Synergistic fusion of interferometric and speckle-tracking methods for deriving surface velocity from interferometric SAR data
    Liu, Hongxing
    Zhao, Zhiyuan
    Jezek, Kenneth C.
    IEEE GEOSCIENCE AND REMOTE SENSING LETTERS, 2007, 4 (01) : 102 - 106
  • [44] Interferometric metrology of wafer nanotopography for advanced CMOS process integration
    Valley, JF
    Koliopoulos, CL
    Tang, SH
    OPTICAL METROLOGY ROADMAP FOR THE SEMICONDUCTOR, OPTICAL, AND DATA STORAGE INDUSTRIES II, 2001, 4449 : 160 - 168
  • [45] An overview of interferometric metrology and NDT techniques and applications for the aerospace industry
    Georges, Marc P.
    Thizy, Cedric
    Languy, Fabian
    Vandenrijt, Jean-Francois
    INTERFEROMETRY XVIII, 2016, 9960
  • [46] HOLOGRAFIC-INTERFEROMETRIC METROLOGY .3. VIBRATION MEASUREMENT
    KOHLER, H
    TECHNISCHES MESSEN, 1980, 47 (04): : 147 - 153
  • [47] Mastering the effects of air turbulence in optical components interferometric metrology
    Mestre, Manuel
    DeWitt, Frank A.
    OPTIFAB 2021, 2021, 11889
  • [48] Influence of spacial temperature distribution on high accuracy interferometric metrology
    Gu Yongqiang
    Miao Erlong
    Yan Feng
    Zhang Jian
    Yang Huaijiang
    5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, 2010, 7656
  • [49] Adaptive interferometric null testing for unknown freeform optics metrology
    Huang, Lei
    Choi, Heejoo
    Zhao, Wenchuan
    Graves, Logan R.
    Kim, Dae Wook
    OPTICS LETTERS, 2016, 41 (23) : 5539 - 5542
  • [50] SURFACE METROLOGY INSTRUMENTATION
    WHITEHOUSE, DJ
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (10): : 1145 - 1155
12345