Evaporation of Ta2O5

被引:0
|
作者
机构
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] EVAPORATION OF TA2O5
    KAZENAS, EK
    PETROV, AA
    SAMOILOVA, IO
    [J]. RUSSIAN METALLURGY, 1994, (05): : 16 - 19
  • [2] Characterization of Ta2O5 thin films prepared by reactive evaporation
    Asghar, M. H.
    Placido, F.
    Naseem, S.
    [J]. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2006, 36 (02): : 119 - 124
  • [3] Permittivity Enhancement of Ta2O5/Co/Ta2O5 Trilayer Films
    Ding, Y.
    Yao, Y. D.
    Wu, K. T.
    Hsu, J. C.
    Hung, D. S.
    Wei, D. H.
    Lin, Y. H.
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 2011, 47 (03) : 710 - 713
  • [4] Study of dry and electrogenerated Ta2O5 and Ta/Ta2O5/Pt structures by XPS
    Kerrec, O
    Devilliers, D
    Groult, H
    Marcus, P
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 55 (1-2): : 134 - 142
  • [5] Vaporization of Ta2O5
    Kazenas, E.K.
    Petrov, A.A.
    Samojlova, I.O.
    [J]. 1600,
  • [6] The comparison between Ta2O5 and Ti-doped Ta2O5 dielectrics
    Kao, Chyuan Haur
    Lai, Pei Lun
    Wang, Hsin Yuan
    [J]. SURFACE & COATINGS TECHNOLOGY, 2013, 231 : 512 - 516
  • [7] Defect energy levels in Ta2O5 and nitrogen-doped Ta2O5
    Shin, Hyunho
    Park, Sang Yeup
    Bae, Shin-Tae
    Lee, Sangwook
    Hong, Kug Sun
    Jung, Hyun Suk
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 104 (11)
  • [8] ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM
    Triyoso, D. H.
    Weinreich, W.
    Seidel, K.
    Nolan, M. G.
    Polakowski, P.
    Utess, D.
    Ohsiek, S.
    Dittmar, K.
    Weisheit, M.
    Liebau, M.
    Fox, R.
    [J]. 2014 IEEE INTERNATIONAL CONFERENCE ON IC DESIGN & TECHNOLOGY (ICICDT), 2014,
  • [9] ELECTROCHEMICAL-BEHAVIOR OF TA/TA2O5 AND TA/TA2O5/PT INTERFACES IN THE PRESENCE OF A REDOX SYSTEM IN SOLUTION
    DEVILLIERS, D
    NAAMOUNE, F
    KERREC, O
    CHEMLA, M
    [J]. JOURNAL DE CHIMIE PHYSIQUE ET DE PHYSICO-CHIMIE BIOLOGIQUE, 1990, 87 (09) : 1609 - 1622
  • [10] DEFECT STRUCTURE OF TA2O5
    STROUD, JE
    TRIPP, WC
    WIMMER, JM
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1974, 57 (04) : 172 - 175