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- [2] Characterization of Ta2O5 thin films prepared by reactive evaporation EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2006, 36 (02): : 119 - 124
- [4] Study of dry and electrogenerated Ta2O5 and Ta/Ta2O5/Pt structures by XPS MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 55 (1-2): : 134 - 142
- [6] The comparison between Ta2O5 and Ti-doped Ta2O5 dielectrics SURFACE & COATINGS TECHNOLOGY, 2013, 231 : 512 - 516
- [8] ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM 2014 IEEE INTERNATIONAL CONFERENCE ON IC DESIGN & TECHNOLOGY (ICICDT), 2014,