Low-temperature polysilicon thin-film transistors fabricated from laser-processed sputtered-silicon films

被引:0
|
作者
Arizona State Univ, Tempe, United States [1 ]
机构
来源
IEEE Electron Device Lett | / 9卷 / 343-344期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] Low-Temperature Polycrystalline-Silicon Tunneling Thin-Film Transistors With MILC
    Chen, Yi-Hsuan
    Yen, Li-Chen
    Chang, Tien-Shun
    Chiang, Tsung-Yu
    Kuo, Po-Yi
    Chao, Tien-Sheng
    IEEE ELECTRON DEVICE LETTERS, 2013, 34 (08) : 1017 - 1019
  • [32] High quality polycrystalline silicon thin film transistors fabricated from laser-irradiated sputtered Si films
    Serikawa, T
    POLYCRYSTALLINE SEMICONDUCTORS VII, PROCEEDINGS, 2003, 93 : 61 - 65
  • [33] Low-temperature solution-processed flexible metal oxide thin-film transistors via laser annealing
    Chen, Cihai
    Yang, Huihuang
    Yang, Qian
    Chen, Gengxu
    Chen, Huipeng
    Guoi, Tailiang
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2019, 52 (38)
  • [34] Zinc oxide thin-film transistors fabricated via low-temperature hydrothermal method
    Wang, Jyh-Liang
    Yang, Po-Yu
    Juang, Miin-Horng
    Hsieh, Tsang-Yen
    Hwang, Chuan-Chou
    Juan, Chuan-Ping
    Lee, I-Che
    SURFACE & COATINGS TECHNOLOGY, 2013, 231 : 428 - 432
  • [35] Low-temperature thin-film silicon MEMS
    Conde, JP
    Gaspar, J
    Chu, V
    THIN SOLID FILMS, 2003, 427 (1-2) : 181 - 186
  • [36] Channel Film Thickness Effect of Low-Temperature Polycrystalline-Silicon Thin-Film Transistors
    Ma, William Cheng-Yu
    Chiang, Tsung-Yu
    Yeh, Chi-Ruei
    Chao, Tien-Sheng
    Lei, Tan-Fu
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (04) : 1268 - 1272
  • [37] CURRENT CHARACTERISTICS OF POLYCRYSTALLINE THIN-FILM TRANSISTORS USING SPUTTERED SILICON FILMS
    TONG, KY
    JELENKOVIC, EV
    SOLID-STATE ELECTRONICS, 1993, 36 (04) : 513 - 517
  • [38] Temperature analysis of polysilicon thin-film transistors made by excimer laser crystallization
    Foglietti, V
    Mariucci, L
    Fortunato, G
    THIN SOLID FILMS, 1999, 337 (1-2) : 196 - 199
  • [39] Low-Temperature, Solution-Processed Zinc Tin Oxide Thin-Film Transistors Fabricated by Thermal Annealing and Microwave Irradiation
    Yoo, Young Bum
    Park, Jee Ho
    Lee, Se Jong
    Song, Kie Moon
    Baik, Hong Koo
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (04)
  • [40] LOW-TEMPERATURE (LESS-THAN-OR-EQUAL-TO-600-DEGREES-C) POLYSILICON THIN-FILM TRANSISTORS
    STROH, RJ
    PLAIS, F
    KRETZ, T
    LEGAGNEUX, P
    HUET, O
    MAGIS, M
    PRIBAT, D
    JIANG, N
    HUGON, MC
    AGIUS, B
    IEE PROCEEDINGS-CIRCUITS DEVICES AND SYSTEMS, 1994, 141 (01): : 9 - 13