Compact electron cyclotron resonance plasma-etching reactor employing permanent magnet

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[1] Narai, Akira
[2] Hashimoto, Tetsuro
[3] Ichihashi, Hideki
[4] Shindo, Haruo
[5] Horiike, Yasuhiro
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Narai, Akira | 1600年 / 30期
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Semiconducting Silicon;
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