Ga2O3 thin films for high-temperature gas sensors

被引：4
|
作者：
Ogita, M. [1 ]
Saika, N. [1 ]
Nakanishi, Y. [2 ]
Hatanaka, Y. [2 ]
机构：
[1] Electronics, Faculty of Engineering, Shizuoka University, 3-5-1, Johoku, Hamamatsu 432-8561, Japan
[2] RIE, Shizuoka University, 3-5-1, Johoku, Hamamatsu 432-8561, Japan
来源：
Applied Surface Science | 1999年 / 142卷 / 01期
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页码：188 / 191
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