Residual strain and crystal structure of BaTiO3-SrTiO3 thin films prepared by metal organic chemical vapor deposition

被引：0
|
作者：
Tokyo Inst of Technology, Yokohama, Japan [1 ]
机构：
来源：
Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 9 B卷 / 5879-5884期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
24
引用
收藏
相关论文
共 50 条
  • [21] Some unusual behavior of dielectric properties of SrTiO3 metal organic chemical vapor deposition grown thin films
    Shreiber, D.
    Cole, M. W.
    Enriquez, E.
    Hirsch, S. G.
    Ngo, E.
    Hubbard, C.
    Ivill, M.
    Chen, Chonglin
    JOURNAL OF APPLIED PHYSICS, 2014, 116 (09)
  • [22] Influence of substrate annealing on the epitaxial growth of BaTiO3 thin films by metal-organic chemical vapor deposition
    Hwang, CS
    Vaudin, MD
    Stauf, GT
    JOURNAL OF MATERIALS RESEARCH, 1997, 12 (06) : 1625 - 1633
  • [23] Influence of substrate annealing on the epitaxial growth of BaTiO3 thin films by metal-organic chemical vapor deposition
    Cheol Seong Hwang
    Mark D. Vaudin
    Gregory T. Stauf
    Journal of Materials Research, 1997, 12 : 1625 - 1633
  • [24] Cathodoluminescence investigation of residual stress in Er3+:YAlO3 thin films grown on (110) SrTiO3 substrate by metal-organic chemical vapor deposition
    Toro, Roberta G.
    Malandrino, Graziella
    Fragala, Ignazio L.
    Wan Keshu
    Leto, Andrea
    Pezzotti, Giuseppe
    JOURNAL OF PHYSICAL CHEMISTRY B, 2006, 110 (47): : 23977 - 23981
  • [25] Electrical properties of SrTiO3/BaTiO3 strained superlattice films prepared by atomic layer metallorganic chemical vapor deposition
    Wang, ZY
    Oda, S
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (12) : 4615 - 4617
  • [26] Formation of core-shell structure in the BaTiO3-SrTiO3 system
    Kim, JS
    Kang, SJL
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1999, 82 (04) : 1085 - 1088
  • [27] Voltage induced acoustic resonance in metal organic chemical vapor deposition SrTiO3 thin film
    Sbrockey, Nick M.
    Tompa, Gary S.
    Kalkur, Thottam S.
    Zhang, Jialan
    Alpay, S. Pamir
    Cole, Melanie W.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2012, 30 (06):
  • [28] Formation of core-shell structure in the BaTiO3-SrTiO3 system
    Ctr. for Interface Sci. and E., Korea Adv. Inst. of Sci. and T., Taejon 305-701, Korea, Republic of
    J Am Ceram Soc, 4 (1085-1088):
  • [29] Nanoscale leakage current measurements in metal organic chemical vapor deposition crystalline SrTiO3 films
    Rozier, Y.
    Gautier, B.
    Hyvert, G.
    Descamps, A.
    Plossu, C.
    Dubourdieu, C.
    Ducroquet, F.
    THIN SOLID FILMS, 2009, 517 (06) : 1868 - 1873
  • [30] Structural and electrical properties of SrTiO3 thin films prepared by plasma enhanced metalorganic chemical vapor deposition
    Hahn, YB
    Kim, DO
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (04): : 1982 - 1986
12345