RECRYSTALLIZATION OF Ge ON SiO2 USING SrF2 SEED BY PSEUDO-LINE ELECTRON BEAM ANNEALING.

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作者：
Yamagishi, Chouho [1 ]
Kimura, Tamotsu [1 ]
Akiyama, Masahiro [1 ]
Kaminishi, Katsuzo [1 ]
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[1] Oki Electric Industry Co, Tokyo, Jpn, Oki Electric Industry Co, Tokyo, Jpn
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| 1600年 / 26期
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