共 50 条
- [23] Novel strong resolution enhancement technology with phase-shifting mask for logic gate pattern fabrication OPTICAL MICROLITHOGRAPHY XVI, PTS 1-3, 2003, 5040 : 383 - 391
- [24] PATTERN TRANSFER CHARACTERISTICS OF TRANSPARENT PHASE-SHIFTING MASK JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11B): : 3004 - 3009
- [25] Simultaneous readout of multiple microcantilever arrays with phase-shifting interferometric microscopy REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (09):
- [26] Phase-shifting interferometric profilometry with a wavelength-tunable diode source Optical Review, 2014, 21 : 410 - 414
- [27] SUBMICRON OPTICAL LITHOGRAPHY BASED ON A NEW INTERFEROMETRIC PHASE-SHIFTING TECHNIQUE JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (8A): : 4269 - 4273
- [28] Phase-shifting algorithms for electronic speckle pattern interferometry Applied Optics, 2002, 41 (01): : 46 - 54
- [29] Design of a Phase-shifting Algorithm for Interferometric Measurement of Optical Thickness Variation PHOTONIC INSTRUMENTATION ENGINEERING VII, 2020, 11287
- [30] Pattern transfer characteristics of transparent phase-shifting mask Watanabe, Hisashi, 1600, (30):