Pulsed laser deposition of aluminum nitride and gallium nitride thin films

被引：0
|
作者：
Sudhir, G.S. [1 ]
Fujii, H. [1 ]
Wong, W.S. [1 ]
Kisielowski, C. [1 ]
Newman, N. [1 ]
Dieker, C. [1 ]
Liliental-Weber, Z. [1 ]
Rubin, M.D. [1 ]
Weber, E.R. [1 ]
机构：
[1] Univ of California, Berkeley, United States
来源：
Applied Surface Science | 1998年 / 127-129卷
关键词：
Number:; E-9EA029-6183; Acronym:; -; Sponsor:; NSF; Sponsor: National Science Foundation;
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页码：471 / 476
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