1 mG lateral CMOS-MEMS accelerometer

被引：0
|
作者：
Luo, Hao [1 ]
Fedder, Gary K. [1 ]
Carley, L.Richard [1 ]
机构：
[1] Carnegie Mellon Univ, Pittsburgh, United States
来源：
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) | 2000年
关键词：
Conditioning circuits;
D O I：
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摘要：
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页码：502 / 507
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