Electrical characteristics of air-bridge-structured silicon nanowire fabricated by micromachining a silicon-on-insulator substrate

被引：0
|
作者：
Fujii, Hideo [1 ,2 ]
Kanemaru, Seigo [1 ]
Matsukawa, Takashi [1 ]
Itoh, Junji [1 ,3 ]
机构：
[1] Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8568, Japan
[2] Japan Sci. and Technol. Corporation, Core Res. Evolutional Sci. T., 4-1-8 Honcho, Kawaguchi-shi, Saitama 332-0012, Japan
[3] University of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8573, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 12 B期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：7237 / 7240
相关论文
共 50 条
  • [31] CHARACTERISTICS OF ERBIUM IMPLANTS IN SILICON-ON-INSULATOR
    TANG, YS
    SEALY, BJ
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (05) : 2530 - 2532
  • [32] A silicon-on-insulator transistor resistant to substrate potential
    Oblea, A.
    Hayhurst, R.
    Wilson, D.
    Hackler, D.
    2007 IEEE WORKSHOP ON MICROELECTRONICS AND ELECTRON DEVICES, 2007, : 25 - 26
  • [33] Integrated microwave inductors on silicon-on-insulator substrate
    Huynen, I
    Raskin, JP
    Gillon, R
    Vanhoenacker, D
    Colinge, JP
    27TH EUROPEAN MICROWAVE 97, CONFERENCE + EXHIBITION - BRIDGING THE GAP BETWEEN INDUSTRY AND ACADEMIA, VOLS I AND II, 1997, : 1008 - 1013
  • [34] CHARACTERIZATION OF BURIED NITRIDE SILICON-ON-INSULATOR SUBSTRATE
    POON, MC
    LAM, YW
    WONG, SP
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1992, 7 (03) : 414 - 417
  • [35] Silicon-on-insulator (SOI) nanowire hot carrier electroluminescence
    du Plessis, Monuko
    Venter, Petrus J.
    2014 IEEE PHOTONICS CONFERENCE (IPC), 2014, : 562 - 563
  • [36] Nanophotonic devices based on silicon-on-insulator nanowire waveguides
    Wosinski, Lech
    ICTON 2006: 8TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS, VOL 1, PROCEEDINGS: ICTON, MPM, INDUSTRIAL, PICAW, GOWN, 2006, : 206 - 209
  • [37] Magneto-transport in a silicon-on-insulator nanowire transistor
    Cho, KH
    Jung, YC
    Son, SH
    Hwang, SW
    Ahn, D
    Park, BG
    Bird, JP
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2005, 47 : S526 - S529
  • [38] Electrical conductivity of silicon-on-insulator structures prepared by bonding silicon wafers to a substrate using hydrogen implantation
    I. V. Antonova
    V. F. Stas’
    V. P. Popov
    V. I. Obodnikov
    A. K. Gutakovskii
    Semiconductors, 2000, 34 : 1054 - 1057
  • [39] Experimental Investigations of Electron Mobility in Silicon Nanowire nMOSFETs on (110) Silicon-on-Insulator
    Chen, Jiezhi
    Saraya, Takura
    Hiramoto, Toshiro
    IEEE ELECTRON DEVICE LETTERS, 2009, 30 (11) : 1203 - 1205
  • [40] HIGH-TC AIR-BRIDGE MICROBOLOMETERS FABRICATED BY SILICON MICROMACHINING TECHNIQUE
    BARTH, R
    SIEWERT, J
    SPANGENBERG, B
    JAEKEL, C
    KURZ, H
    UTZ, B
    PRUSSEIT, W
    WOLF, H
    MICROELECTRONIC ENGINEERING, 1995, 27 (1-4) : 499 - 502
12345