Electrical characteristics of air-bridge-structured silicon nanowire fabricated by micromachining a silicon-on-insulator substrate

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作者：
Fujii, Hideo [1 ,2 ]
Kanemaru, Seigo [1 ]
Matsukawa, Takashi [1 ]
Itoh, Junji [1 ,3 ]
机构：
[1] Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8568, Japan
[2] Japan Sci. and Technol. Corporation, Core Res. Evolutional Sci. T., 4-1-8 Honcho, Kawaguchi-shi, Saitama 332-0012, Japan
[3] University of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8573, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 12 B期
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页码：7237 / 7240
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