Preparation of Bi4Ti3O12 thin films by electron cyclotron resonance sputtering

被引：0
|
作者：
Maiwa, Hiroshi [1 ]
Ichinose, Noboru [1 ]
机构：
[1] Shonan Inst of Technology, Kanagawa, Japan
来源：
Integrated Ferroelectrics | 1996年 / 12卷 / 2 -4 pt 1期
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摘要：
Dielectric films
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页码：215 / 223
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