Molecular simulation of film growth rate in the low-pressure CVD method. (Two-dimensional horizontal reactor)

被引：0

作者：

Nanbu, Kenichi

Igarashi, Saburo

Watanabe, Yasuo

机构：

来源：

Nippon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B | 1990年 / 56卷 / 524期

关键词：

Test-Particle Monte Carlo Method;

D O I：

10.1299/kikaib.56.892

中图分类号：

学科分类号：

摘要：

引用

页码：892 / 897

共 50 条

[21] NUMERICAL-SIMULATION OF THE HORIZONTAL BRIDGMAN GROWTH .1. TWO-DIMENSIONAL FLOW
CROCHET, MJ
GEYLING, FT
VANSCHAFTINGEN, JJ
INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN FLUIDS, 1987, 7 (01) : 29 - 47
[22] Two-dimensional simulations of temperature fields of the reactor wall during hot-filament CVD diamond film growth over a large area
Wang, AY
Sun, C
Cao, HT
Ji, AL
Huang, RF
Wen, LS
MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING, 2004, 12 (02) : 325 - 335
[23] SEMI-INSULATING POLYSILICON (SIPOS) DEPOSITION IN A LOW-PRESSURE CVD REACTOR .1. GROWTH-KINETICS
HITCHMAN, ML
KANE, J
JOURNAL OF CRYSTAL GROWTH, 1981, 55 (03) : 485 - 500
[24] INVESTIGATIONS OF THE GROWTH OF TUNGSTEN AND TUNGSTEN SILICIDES ON SIO2 SUBSTRATES BY LOW-PRESSURE CVD METHOD
CHEN, JR
FANG, YK
HSU, SL
APPLIED SURFACE SCIENCE, 1988, 33-4 : 578 - 586
[25] EPITAXIAL-GROWTH OF ALN FILM BY LOW-PRESSURE MOCVD IN GAS-BEAM-FLOW REACTOR
KANEKO, S
TANAKA, M
MASU, K
TSUBOUCHI, K
MIKOSHIBA, N
JOURNAL OF CRYSTAL GROWTH, 1991, 115 (1-4) : 643 - 647
[26] Growth rate and deposition process of silicon carbide film by low-pressure chemical vapor deposition
Murooka, K
Higashikawa, I
Gomei, Y
JOURNAL OF CRYSTAL GROWTH, 1996, 169 (03) : 485 - 490
[27] EXPERIMENTAL AND NUMERICAL STUDY OF THE GROWTH OF GAAS EPITAXIAL LAYERS AND ALGAAS SOLID-SOLUTIONS IN HORIZONTAL REACTOR AT LOW-PRESSURE
ZHMAKIN, AI
KADINSKII, LA
KUZMIN, IA
MAKAROV, YN
SUBASHIEVA, EA
YAVICH, BS
PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1989, 15 (15): : 76 - 79
[28] Two-dimensional analysis of low-pressure flows in an inclined square cavity with two fins attached to the hot wall
Al-Kouz, Wael
Alshare, Aiman
Kiwan, Suhil
Al-Muhtady, Ahmad
Alkhalidi, Ammar
Saadeh, Haneen
INTERNATIONAL JOURNAL OF THERMAL SCIENCES, 2018, 126 : 181 - 193
[29] Numerical Simulation of Two-Dimensional Forced Convective Film Boiling Flow over a Horizontal Flat Surface
Ningegowda, B. M.
Premachandran, B.
IUTAM SYMPOSIUM ON MULTIPHASE FLOWS WITH PHASE CHANGE: CHALLENGES AND OPPORTUNITIES, 2015, 15 : 256 - 263
[30] STUDIES OF THE EFFECTS OF NF3 ON THE GROWTH OF POLYSILICON FILMS BY LOW-PRESSURE CVD .1. EFFECT ON GROWTH-RATE
HITCHMAN, ML
ZHAO, JF
SHAMLIAN, SH
JOURNAL OF MATERIALS CHEMISTRY, 1994, 4 (12) : 1821 - 1826

← 1 2 3 4 5 →