Simulated annealing optimization algorithm for inverting ellipsometric spectra

被引:0
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作者
Yang, Shenghong [1 ]
Yu, Zhaoxian [1 ]
Li, Huiqiu [1 ]
Zhang, Yueli [1 ]
Mo, Dang [1 ]
机构
[1] Zhongshan Univ, Guangzhou, China
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摘要
10
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页码:338 / 342
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