Comparative analysis of thin films of hydrogenated and unhydrogenated amorphous silicon carbide

被引：0
|
作者：
Vasin, A.V. [1 ]
Rusavskij, A.V. [1 ]
Starik, S.P. [1 ]
Kushnirenko, V.I. [1 ]
Kutsaj, A.M. [1 ]
Nazarov, A.N. [1 ]
Lysenko, V.S. [1 ]
Semenov, A.V. [1 ]
Puzikov, V.M. [1 ]
Gontar', A.G. [1 ]
Dub, S.N. [1 ]
机构：
[1] Inst. Fiziki Poluprovodnikov, NAN Ukrainy, Kiev, Ukraine
来源：
Sverkhtverdye Materialy | 2004年 / 03期
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学科分类号：
摘要：
Silicon carbide
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页码：36 / 46
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