Comparative analysis of thin films of hydrogenated and unhydrogenated amorphous silicon carbide

被引：0
|
作者：
Vasin, A.V. [1 ]
Rusavskij, A.V. [1 ]
Starik, S.P. [1 ]
Kushnirenko, V.I. [1 ]
Kutsaj, A.M. [1 ]
Nazarov, A.N. [1 ]
Lysenko, V.S. [1 ]
Semenov, A.V. [1 ]
Puzikov, V.M. [1 ]
Gontar', A.G. [1 ]
Dub, S.N. [1 ]
机构：
[1] Inst. Fiziki Poluprovodnikov, NAN Ukrainy, Kiev, Ukraine
来源：
Sverkhtverdye Materialy | 2004年 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Silicon carbide
引用
收藏
页码：36 / 46
相关论文
共 50 条
  • [1] Comparative EPR study of hydrogenated and unhydrogenated amorphous silicon carbide thin films
    Christidis, T
    Tabbal, M
    Isber, S
    El Khakani, MA
    Chaker, M
    APPLIED SURFACE SCIENCE, 2001, 184 (1-4) : 268 - 272
  • [2] Fracture properties of hydrogenated amorphous silicon carbide thin films
    Matsuda, Y.
    King, S. W.
    Bielefeld, J.
    Xu, J.
    Dauskardt, R. H.
    ACTA MATERIALIA, 2012, 60 (02) : 682 - 691
  • [3] Multiphase structure of hydrogenated amorphous silicon carbide thin films
    Wang, YH
    Lin, J
    Huan, CHA
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2002, 95 (01): : 43 - 50
  • [4] High temperature annealing of hydrogenated amorphous silicon carbide thin films
    Wang, YH
    Lin, JY
    Huan, CHA
    Feng, ZC
    Chua, SJ
    THIN SOLID FILMS, 2001, 384 (02) : 173 - 176
  • [5] Elaboration of Porous Thin Hydrogenated Amorphous Silicon Carbide Films for Optoelectronic Device
    Boukezzata, A.
    Keffous, A.
    Gabouze, N.
    Manseri, A.
    Mahmoudi, B.
    Kaci, S.
    Guerbous, L.
    Menari, H.
    Bouanik, S.
    Belkacem, Y.
    JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2019, 14 (03) : 321 - 327
  • [6] Structure and properties of hydrogenated amorphous silicon carbide thin films deposited by PECVD
    Zhang, Yiying
    Du, Piyi
    Zhang, Ran
    Han, Gaorong
    Weng, Wenjian
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2008, 354 (12-13) : 1435 - 1439
  • [7] Infrared analysis of thin films: Amorphous, hydrogenated carbon on silicon
    Jacob, W
    von Keudell, A
    Schwarz-Selinger, T
    BRAZILIAN JOURNAL OF PHYSICS, 2000, 30 (03) : 508 - 516
  • [8] Optical properties of hydrogenated amorphous silicon carbide films
    Choi, W.K., 2000, Scitec Publications Ltd., Zurich (177):
  • [9] Optical properties of hydrogenated amorphous silicon carbide films
    Choi, WK
    DEFECTS AND DIFFUSION IN CERAMICS: AN ANNUAL RETROSPECTIVE II, 2000, 177-1 : 29 - 42
  • [10] Room temperature photoluminescence spectrum modeling of hydrogenated amorphous silicon carbide thin films by a joint density of tail states approach and its application to plasma deposited hydrogenated amorphous silicon carbide thin films
    Sel, Kivanc
    Gunes, Ibrahim
    THIN SOLID FILMS, 2012, 520 (24) : 7062 - 7065
12345