Multilevel-grating array generators: fabrication error analysis and experiments

被引：0
|
作者：
Miller, J.Michael
Taghizadeh, Mohammad R.
Turunen, Jari
Ross, Neil
机构：
来源：
Applied Optics | 1993年 / 32卷 / 14期
关键词：
Error analysis;
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中图分类号：
学科分类号：
摘要：
Multilevel-grating array generators are discussed with an emphasis on the problems obtained in their fabrication. A fabrication error analysis procedure is presented which discuss the effects of mask alignment in the surface-relief profiles of an 8-beam array illuminator. Graphs and tables are presented showing the theoretical diffraction efficiencies for several two-dimensional grating array illuminators. Also considered are etch-depth errors. These results are simulated and evaluated numerically.
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页码：2519 / 2525
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