PROPERTIES OF ALUMINUM THIN COATINGS FOR IC PACKAGING MATERIALS.

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作者：
Kanehiro, Kazuo
Maeda, Takao
Igarashi, Tadashi
Kudo, Kazunao
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来源：
Sumitomo Electric Technical Review | 1987年 / 26期
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INTEGRATED CIRCUITS
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页码：217 / 223
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