Chemical etching of Ni-Ti SMA film

被引：0
|
作者：
Ding, Guifu [1 ]
Xu, Dong [1 ]
Zhao, Xiaolin [1 ]
Zhang, Shoubai [1 ]
Cai, Bingchu [1 ]
Shen, Tianhui [1 ]
机构：
[1] Shanghai Jiaotong Univ, Shanghai, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1999年 / 03期
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摘要：
(Edited Abstract)
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页码：20 / 26
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