Characteristics of xenon capillary Z-pinch extreme ultraviolet lithography source driven by different dI/dt discharge current pulses

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[1] Song, Inho
[2] Iwata, Kazuhiro
[3] Homma, Yusuke
[4] Mohanty, Smruti Ranjan
[5] Watanabe, Masato
[6] Kawamura, Toru
[7] Okino, Akitoshi
[8] Yasuoka, Koichi
[9] Horioka, Kazuhiko
[10] Hotta, Eiki
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Song, I. (inno@plasma.es.titech.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 44期
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