Nondestructive picosecond-ultrasonic characterization of Mo/Si extreme ultraviolet multilayer reflection coatings

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Pu, Nen-Wen
Bokor, Jeffrey
Jeong, Seongtae
Zhao, Ri-An
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | / 17卷
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页码：3014 / 3018
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