Plasma oxidation of copper thin films

被引：0
|
作者：
机构：
[1] Iro, Wataru
[2] Shimada, Haruo
[3] Imafuku, Muneyuki
[4] Hashimoto, Misao
来源：
Iro, Wataru | 1877年 / 30期
关键词：
High Temperature Superconductors;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] PLASMA OXIDATION OF COPPER THIN-FILMS
    ITO, W
    SHIMADA, H
    IMAFUKU, M
    HASHIMOTO, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (11A): : L1877 - L1880
  • [2] OXIDATION AND PROTECTION IN COPPER AND COPPER ALLOY THIN-FILMS
    LI, J
    MAYER, JW
    COLGAN, EG
    JOURNAL OF APPLIED PHYSICS, 1991, 70 (05) : 2820 - 2827
  • [3] PLASMA OXIDATION OF TASIX THIN-FILMS
    ROMAN, RG
    PEREZCASERO, R
    ENARD, JP
    PERRIERE, J
    MARTINEZDUART, JM
    APPLIED SURFACE SCIENCE, 1991, 53 : 254 - 259
  • [4] Nanostructures design by plasma afterglow-assisted oxidation of iron-copper thin films
    Imam, A.
    Boileau, A.
    Gries, T.
    Ghanbaja, J.
    Mangin, D.
    Hussein, K.
    Sezen, H.
    Amati, M.
    Belmonte, T.
    JOURNAL OF CRYSTAL GROWTH, 2016, 442 : 52 - 61
  • [5] An ellipsometric study of the oxidation of thin copper films in oxygen
    Khoviv, AM
    Nazarenko, IN
    Churikov, AA
    INORGANIC MATERIALS, 2001, 37 (05) : 473 - 475
  • [6] Oxidation of polycrystalline copper thin films at ambient conditions
    Platzman, Ilia
    Brener, Reuven
    Haick, Hossam
    Tannenbaum, Rina
    JOURNAL OF PHYSICAL CHEMISTRY C, 2008, 112 (04): : 1101 - 1108
  • [7] Reflectometry studies of the oxidation kinetics of thin copper films
    Njeh, A
    Wieder, T
    Fuess, H
    SURFACE AND INTERFACE ANALYSIS, 2002, 33 (07) : 626 - 628
  • [8] Natural Oxidation of Ultra-Thin Copper Films
    Semenov, V. A.
    Oskirko, V. O.
    Rabotkin, S. V.
    Oskomov, K. V.
    Solovyev, A. A.
    Stepanov, S. A.
    RUSSIAN PHYSICS JOURNAL, 2018, 60 (09) : 1559 - 1564
  • [9] Natural Oxidation of Ultra-Thin Copper Films
    V. A. Semenov
    V. O. Oskirko
    S. V. Rabotkin
    K. V. Oskomov
    A. A. Solovyev
    S. A. Stepanov
    Russian Physics Journal, 2018, 60 : 1559 - 1564
  • [10] An Ellipsometric Study of the Oxidation of Thin Copper Films in Oxygen
    A. M. Khoviv
    I. N. Nazarenko
    A. A. Churikov
    Inorganic Materials, 2001, 37 : 473 - 475
12345