Laser micro-Raman spectroscopy of single-point diamond machined silicon substrates

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作者：
Yan, Jiwang [1 ]
机构：
[1] Dept. of Mechanical Engineering, Kitami Institute of Technology, Koen-cho 165, Kitami, Hokkaido 090-8507, Japan
来源：
Journal of Applied Physics | 1600年 / 95卷 / 04期
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摘要：
40
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页码：2094 / 2101
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