共 50 条
- [34] In situ process monitoring in plasma immersion ion implantation based on measurements of secondary electron emission coefficient SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3): : 83 - 86
- [36] Experimental study of breakdown voltage and effective secondary electron emission coefficient for a micro-plasma device PLASMA SOURCES SCIENCE & TECHNOLOGY, 2004, 13 (02): : 207 - 212
- [39] THEORY OF A RADIO-FREQUENCY PLASMA PROBE FOR ELECTRON-DENSITY MEASUREMENTS IN IONOSPHERE AND EXOSPHERE JOURNAL OF GEOPHYSICAL RESEARCH, 1963, 68 (17): : 5089 - +
- [40] Spectroscopic evaluation of vibrational temperature and electron density in reduced pressure radio frequency nitrogen plasma SN Applied Sciences, 2021, 3