High-rate growth of stable a-Si:H

被引：0
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作者：
Takagi, T. [1 ]
Hayashi, R. [1 ]
Payne, A. [1 ]
Futako, W. [1 ]
Nishimoto, T. [1 ]
Takai, M. [1 ]
Kondo, M. [1 ]
Matsuda, A. [1 ]
机构：
[1] Thin Film Silicon Solar Cells Super Lab., Electrotechnical Laboratory, Ibaraki, Japan
来源：
Materials Research Society Symposium - Proceedings | 1999年 / 557卷
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页码：105 / 114
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