共 50 条
- [1] High-rate growth of stable a-Si:H AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999, 1999, 557 : 105 - 114
- [3] High-rate a-Si:H for TFTs: A comparative study PROCEEDINGS OF THE THIRD SYMPOSIUM ON THIN FILM TRANSISTOR TECHNOLOGIES, 1997, 96 (23): : 146 - 157
- [4] High-rate selective etching of a-Si:H using hydrogen radicals Nagayoshi, Hiroshi, 1600, JJAP, Minato-ku, Japan (33):
- [5] Study of microvoids in high-rate a-Si:H using positron annihilation AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY - 1997, 1997, 467 : 525 - 530
- [6] High-rate a-Si:H and μc-Si:H film growth studied by advanced plasma and in situ film diagnostics AMORPHOUS AND HETEROGENEOUS SILICON-BASED FILMS-2002, 2002, 715 : 43 - 48
- [8] High-rate PECVD of low defect density a-Si:H on large areas AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY - 1997, 1997, 467 : 579 - 584
- [9] HIGH-RATE PECVD OF A-SI ALLOYS ON LARGE AREAS SURFACE & COATINGS TECHNOLOGY, 1995, 74-5 (1-3): : 259 - 263
- [10] High-rate RPECVD of a-Si:H films by means of a VHF resonant plasma source AMORPHOUS SILICON TECHNOLOGY - 1996, 1996, 420 : 369 - 374