Thermal annealing of waveguides formed by ion implantation of silica-on-Si

被引：0
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作者：
Johnson, C.M. [1 ]
Ridgway, M.C. [1 ]
Kurver, A. [1 ]
Leech, P.W. [1 ]
Simpson, P.J. [1 ]
机构：
[1] Australian Natl Univ, Canberra
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1998年 / 141卷 / 1-4期
关键词：
Number:; -; Acronym:; ATERB; Sponsor: Australian Telecommunications and Electronics Research Board; DEEWR; Sponsor: Department of Education; Employment and Workplace Relations; Australian Government;
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页码：670 / 674
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