Synthesis of carbon nitride films by electron cyclotron resonance sputtering deposition method

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作者：
Tani, Youji [1 ]
Aoi, Yoshifumi [1 ]
Kamijyo, Eiji [1 ]
机构：
[1] Ryukoku Univ, Otsu Siga, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 1998年 / 41卷 / 05期
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页码：512 / 515
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