Synthesis of carbon nitride films by electron cyclotron resonance sputtering deposition method

被引：0
|
作者：
Tani, Youji [1 ]
Aoi, Yoshifumi [1 ]
Kamijyo, Eiji [1 ]
机构：
[1] Ryukoku Univ, Otsu Siga, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 1998年 / 41卷 / 05期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：512 / 515
相关论文
共 50 条
  • [1] Synthesis of Crystalline Carbon Nitride Thin Films by Electron Cyclotron Resonance (ECR) Sputtering Method
    2000, M Y U Scientific Publishing Division (10):
  • [2] Synthesis of crystalline carbon nitride thin films by electron cyclotron resonance (ECR) sputtering method
    Aoi, Y
    Tani, Y
    Tamaoka, K
    Hirahara, T
    Hisa, M
    Kamijo, E
    NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 2000, 10 (04): : 213 - 223
  • [3] Preparation and characterization of carbon nitride thin films by electron cyclotron resonance (ECR) sputtering method
    Aoi, Y
    Tani, Y
    Hisa, M
    Kamijo, E
    PROPERTIES AND PROCESSING OF VAPOR-DEPOSITED COATINGS, 1999, 555 : 419 - 422
  • [4] Preparation and characterization of carbon nitride thin films by electron cyclotron resonance (ECR) sputtering method
    Department of Materials Chemistry, High-Tech Research Center, Ryukoku University, Seta, Otsu 520-2194, Japan
    Mater Res Soc Symp Proc, (419-422):
  • [5] Composition and crystal structure of carbon nitride films prepared by the electron cyclotron resonance plasma sputtering method
    Appl Phys Lett, 12 (1652):
  • [6] Composition and crystal structure of carbon nitride films prepared by the electron cyclotron resonance plasma sputtering method
    Tani, Y
    Aoi, Y
    Kamijo, E
    APPLIED PHYSICS LETTERS, 1998, 73 (12) : 1652 - 1654
  • [7] Electron cyclotron resonance assisted chemical vapor deposition of carbon nitride films on diamond
    Wu, KH
    Wang, EG
    Qing, J
    Xu, GC
    JOURNAL OF APPLIED PHYSICS, 1998, 83 (03) : 1702 - 1704
  • [8] Electron cyclotron resonance assisted chemical vapor deposition of carbon nitride films on diamond
    J Appl Phys, 3 (1702):
  • [9] Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source
    Rodil, S
    Morrison, NA
    Milne, WI
    Robertson, J
    Stolojan, V
    Jayawardane, DN
    DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) : 524 - 529
  • [10] Structure and electrochemical properties of carbon films prepared by a electron cyclotron resonance sputtering method
    Jia, nbo Jia
    Kato, Dai
    Kurita, Ryoji
    Sato, Yukari
    Maruyama, Kenichi
    Suzuki, Koji
    Hirono, Shigeru
    Ando, Toshihiro
    Niwa, Osamu
    ANALYTICAL CHEMISTRY, 2007, 79 (01) : 98 - 105
12345