共 50 条
- [44] Deposition of cubic boron nitride with an inductively coupled plasma SURFACE & COATINGS TECHNOLOGY, 1995, 74-75 (1-3): : 806 - 812
- [45] On the role of ion bombardment in cubic boron nitride deposition SURFACE & COATINGS TECHNOLOGY, 1997, 97 (1-3): : 263 - 269
- [47] Process diagnostics during the deposition of cubic boron nitride SURFACE & COATINGS TECHNOLOGY, 1997, 90 (03): : 275 - 284