Studies of ferroelectric film growth processes using in situ, real-time ion beam analysis

被引：0
|
作者：
Krauss, A.R. [1 ]
Auciello, O. [1 ]
Im, J. [1 ]
Smentkowski, V. [1 ]
Gruen, D.M. [1 ]
Irene, E.A. [1 ]
Chang, R.P.H. [1 ]
机构：
[1] Argonne Natl Lab, Argonne, United States
来源：
Integrated Ferroelectrics | 1997年 / 18卷 / 1 -4 pt 2期
关键词：
Number:; DMR; 942-2; 182; Acronym:; NSF; Sponsor: National Science Foundation; -; N00014-89-J-1178; ONR; Sponsor: Office of Naval Research; USDOE; Sponsor: U.S. Department of Energy; W-3; 1-109-ENG-38; BES; Sponsor: Basic Energy Sciences;
D O I：
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摘要：
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页码：351 / 368
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