Dielectric properties of electron-cyclotron-resonance-sputtered (Ba, Sr)TiO3 films

被引：0
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作者：
Ohfuji, Shin-ichi [1 ]
Itsumi, Manabu [1 ]
Akiya, Hideo [1 ]
机构：
[1] NTT System Electronics Lab, Kanagawa, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 9 B期
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页码：5854 / 5859
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