Crystal structure and dielectric properties of radio frequency magnetron sputtered nanocrystalline SrTiO3thin films

被引：0
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作者：
Wang, Moo-Chin [1 ,4 ]
Hsiao, Fu-Yuan [2 ]
Huang, Hong-Hsin [3 ]
Wu, Nan-Chun [2 ]
机构：
[1] Department of Mechanical Engineering, Natl. Kaohsiung Univ. of Appl. Sci., 415 Chien-Kung Road, Kaohsiung 80782, Taiwan
[2] Department of Materials Science and Engineering, National Cheng Kung University, 1 Ta-Hsueh Road, Tainan 70101, Taiwan
[3] Department of Electrical Engineering, Cheng Shiu University, 840 Cheng-Ching Road, Niaosung Hsiang, Kaohsiung 83342, Taiwan
[4] Department of Materials Science and Engineering, National United University, 1 Lien-Da, Kung-Ching Li, Miao Li 360, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2004年 / 43卷 / 09期
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页码：6323 / 6328
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