Properties of radio frequency magnetron sputtered silicon dioxide films

被引：0
|
作者：
Natl Chiao Tung Univ, Hsinchu, Taiwan [1 ]
机构：
来源：
Appl Surf Sci | / 3卷 / 237-243期
关键词：
This work is supportedb y the Chung-Shan Institute of Science and Technology (contract No. CS 83-0210-D-009-001)a nd partly supportedb y the National Science Council of Taiwan; ROC (contract No. NSC 82-041 7-E009-395);
D O I：
暂无
中图分类号：
学科分类号：
摘要：
20
引用
收藏
相关论文
共 50 条
  • [1] Properties of radio frequency magnetron sputtered silicon dioxide films
    Wu, WF
    Chiou, BS
    APPLIED SURFACE SCIENCE, 1996, 99 (03) : 237 - 243
  • [2] GROWTH AND MICROSTRUCTURAL STUDY OF RADIO-FREQUENCY MAGNETRON SPUTTERED MGO FILMS ON SILICON
    PINTO, R
    POOTHRA, JI
    PURANDARE, SC
    PAI, SP
    DSOUZA, CP
    KUMAR, D
    SHARON, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (05): : 2670 - 2674
  • [3] Postdeposition annealing of radio frequency magnetron sputtered ZnO films
    Puchert, MK
    Timbrell, PY
    Lamb, RN
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (04): : 2220 - 2230
  • [4] Radio frequency magnetron sputtered CdO thin films for optoelectronic applications
    Sakthivel, P.
    Murugan, R.
    Asaithambi, S.
    Karuppaiah, M.
    Rajendran, S.
    Ravi, G.
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2019, 126 : 1 - 10
  • [5] PROPERTIES OF MAGNETRON-SPUTTERED SILICON-NITRIDE FILMS
    SERIKAWA, T
    OKAMOTO, A
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (12) : 2928 - 2933
  • [6] ELECTRICAL PROPERTIES OF RF SPUTTERED SILICON DIOXIDE FILMS
    KUSHNIR, AJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (08) : C257 - &
  • [7] CRYSTALLIZATION AND MICROSTRUCTURE STUDY OF RADIO-FREQUENCY MAGNETRON-SPUTTERED PBTIO3 FILMS ON SILICON
    WU, TB
    HONG, TJ
    JIANG, MC
    MATERIALS CHEMISTRY AND PHYSICS, 1994, 36 (3-4) : 337 - 342
  • [8] RADIO-FREQUENCY SPUTTERED SILICON-CARBIDE FILMS
    SANKUER, RF
    AMERICAN CERAMIC SOCIETY BULLETIN, 1973, 52 (08): : 635 - 635
  • [9] Effects of Radio Frequency Bias on the Structure Parameters and Mechanical Properties of Magnetron-Sputtered Nb Films
    Ni, Zegang
    Zhong, Yuan
    Tao, Xingfu
    Li, Wei
    Gao, Huifang
    Yao, Yan
    CRYSTALS, 2022, 12 (02)
  • [10] Exploring the effects of substrate and substrate temperature on the properties of radio frequency magnetron sputtered ZnO thin films
    Puthiyottil, Hajara
    Thankamani, Priya Rose
    Saji, Kachirayil Joseph
    MATERIALS TODAY COMMUNICATIONS, 2023, 36
12345